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CH35热成像测量 Herbert M. Runciman. "Thermal Imaging." Copyright 2000 CRC Press LLC. . © 1999 by CRC Pre All objects a makes use o selected regi generate a p such a way t Thermal together wit thermal ima can be used detect, recog fa...

CH35热成像测量
Herbert M. Runciman. "Thermal Imaging." Copyright 2000 CRC Press LLC. . © 1999 by CRC Pre All objects a makes use o selected regi generate a p such a way t Thermal together wit thermal ima can be used detect, recog favored over 35.1 E All thermal waveband, a detector arr (a “staring a can give goo single row o across the d Herbert M Pilkington Op ss LLC Thermal Imaging 35.1 Essential Components 35.2 Thermal Imaging Wavebands 35.3 Emission from Source 35.4 Atmospheric Transmission 35.5 Detectors Photon Detectors • Thermal Detectors • Detector Performance Measures • Detector Cooling 35.6 Electronics 35.7 Optics and Scanning 35.8 Temperature References 35.9 Imager Performance SNR and NETD • Minimum Resolvable Temperature Difference 35.10 Available Imagers 35.11 Performance Trade-offs 35.12 Future Trends in Thermal Imaging t temperatures above absolute zero emit electromagnetic radiation. Radiation thermometry f this fact to estimate the temperatures of objects by measuring the radiated energy from ons. Thermal imaging takes the process one stage further and uses the emitted radiation to icture of the object and its surroundings, usually on a TV display or computer monitor, in hat the desired temperature information is easily interpreted by the user. imagers require no form of illumination to operate, and the military significance of this, h their ability to penetrate most forms of smoke, has been largely responsible for driving ger development. Although thermal imagers intended for military or security applications for temperature measurement, they are not optimized for this purpose since the aim is to nize, or identify targets at long ranges by their shape; thus, resolution and sensitivity are radiometric accuracy. ssential Components imagers must have a detector or array of detectors sensitive to radiation in the required nd optics to form an image of the object on the detector. In modern thermal imagers, the ay might have a sufficient number of sensitive elements to cover the focal plane completely rray”), in the same way as a CCD television camera. Some of the most recent staring arrays d performance without cooling. In other imagers, the detector might take the form of a r column of elements, in which case a scanning mechanism is required to sweep the image etector array. If a single-element detector, or a very small detector array, is used, a means of . Runciman tronics © 1999 by CRC Pre providing a scanning im performance Although the detector reference bo and accessed or by deflec 35.2 T The optimu emitted rad technology. The powe its surface. If It then also (given later) temperature at a wavelen about 3 m m, objects. The to the energ It is impo observed. Th at 4.2 m m du FIGURE 35.1 scanning with two-dimensional scan is required. (Figure 35.1 shows these options schematically.) For agers, it is necessary to cool the detectors (usually to about 80 K to 120 K) to achieve adequate . in principle it would be possible to deduce target temperature from the absolute value of signal, it is necessary in practice to estimate temperature by comparison with one or more dies of known temperature. The temperature references are usually internal to the equipment, by mechanical movement of the reference (which may take the form of a rotating chopper) ting the optical path using a mirror. hermal Imaging Wavebands m waveband for thermal imaging is determined partly by the wavelength distribution of the iation, partly by the transmission of the atmosphere, and partly by the chosen detector r radiated from a given area of an object depends only on its temperature and the nature of the surface absorbs radiation of all wavelengths completely, it is referred to as a “blackbody.” emits the maximum amount possible, which can be calculated using the Planck equation . Figure 35.2(a) shows the way in which blackbody emission varies with wavelength for several s. It will be seen that for objects near normal ambient temperature, maximum output occurs gth of about 10 m m, or about 20 times the wavelength of visible light. At wavelengths below there is generally insufficient energy emitted to allow thermal imaging of room-temperature emissivity at any wavelength is defined as the ratio of the energy emitted at that wavelength y that would be emitted by a blackbody at the same wavelength. rtant that the atmosphere should have sufficient transparency to permit the target to be ere are two important “atmospheric windows” — one between 3 m m and 5 m m (with a notch e to carbon dioxide absorption) and one between 7.5 m m and 14 m m. These are commonly Thermal imaging options: (a) 2-D scanning for small detector array or single element; (b) 1-D linear detector array; (c) staring array without scanning. ss LLC © 1999 by CRC Pre referred to a For thermal but most ins and 10 m of Emissivity lower and m in the MWI favor the LW detector tec either band, give similar staring array For temp scale derived temperature FIGURE 35.2 sufficiently hi s the medium-wave infrared (MWIR) and long-wave infrared (LWIR) windows, respectively. measurement over short ranges in the laboratory, it is possible to work outside these bands, truments are optimized for either the MWIR or LWIR. Typical transmissions through 1 km a clear U.S. Standard Atmosphere are shown in Figures 35.2(b) and 35.2(c). for most naturally occurring objects and organic paints is high (>0.8) in the LWIR, but is ore variable in the MWIR. Metallic surfaces have low emissivity in both bands. Solar radiation R is significant, and can cause errors in measurements made outdoors. These considerations IR for quantitative imaging, but the band chosen can also be influenced by the chosen hnology, the latter frequently being determined by cost. Scanning imagers can be used in but are more sensitive for a given detector architecture in the LWIR. Cooled staring arrays sensitivity in either band, but are currently more readily available in the MWIR. Uncooled s work well only in the LWIR band. erature measurement, the electronics can be used to encode signal level as false color, a color from the thermal references being injected into the display to allow the user to identify the of the object under examination. For general surveillance, a conventional gray-scale image Factors determining thermal imaging wavebands. Imager must operate in regions where radiance is gh (a) and atmospheric transmission is good (b) and (c). ss LLC © 1999 by CRC Pre is usually preferred. Imagers for thermography can also include emissivity compensation. If accurate results are r anything tha the object is temperature 35.3 E The spectral equation [1 frequently s making the of photon d the radiance photon flux equations ar where: Num c 1 = c 2 = c 3 = The unit of The abov per steradian are obtained some cautio temperature equired for an object of low emissivity, it is important to ensure that the temperature of t might be reflected by the object is known and that the emissivity is accurately known. If accessible, another object placed beside it with the same surface characteristics but known can be used for calibration. mission from Source radiance W(l ,T) of a blackbody at temperature T and wavelength l is given by the Planck ]. For temperature differences between the target and the reference of a few degrees, it is ufficiently accurate to assume a linear dependence of radiance on temperature difference, temperature derivative of the blackbody equation, dW(l ,T)/dT, more relevant. In the case etectors, the detector output is proportional to the photon flux, which can be derived from using the fact that photon energy E(l ) = hc/l , where h is the Planck constant. The total N(l ) and its derivative with respect to temperature are thus relevant in this case. The e as follows: (35.1) (35.2) (35.3) (35.4) erical values of the constants are: 3.742 · 108 1.439 · 104 1.884 · 1027 wavelength is chosen for convenience to be the micrometer (m m). e values are for radiation into a hemisphere. The intensities (watts per steradian, photons , etc.) are obtained by dividing the above values by p . The actual radiances for real targets by multiplying by the spectral emissivity e (l ); but since target reflectivity r (l ) = 1 – e (l ), n is required. For example, a target at temperature T surrounded by a background of Tb will appear to emit W(l ,T)e (l ) + W(l ,Tb)r (l ) = [W(l ,T) – W(l ,Tb)]e (l ) + W(l ,Tb). W T c e c T λ λ λ , , ( ) = −     µ− −1 5 2 1 2 1 W m N T c e c T λ λ λ , , ( ) = −     µ− − −3 4 1 2 1 2 1 photons s m m d d W m m K W T T c c e T e c T c T λ λ λ λ , , ( ) = −     µ− − −1 2 6 2 2 1 1 2 2 1 d d photons s m m K N T T c c e T e c T c T λ λ λ λ , , ( ) = −     µ− − − −3 2 5 2 1 2 1 1 2 2 1 ss LLC © 1999 by CRC Pre Provided tha acts as an iso The differen a small temp The spectral A major d the contrast the LWIR. 35.4 A Provided th transmission atmospheric The standard transmission the backgro LWIR is sev operation in absorptions 35.5 D There are tw of photon d Chapter 6.1. Photon D In photon d semiconduc potential dif of not requi 40% lower recombinati electronics. T of the spectr widely used is the quantu (in either wa the LWIR, b also an exce uniformity o Detectors over the sam t the background surrounds the target and that the target is reasonably small, the background thermal enclosure, which can be shown [2] to behave as an ideal blackbody (i.e., e (l ) = 1). tial spectral radiance against background D W(l ) is thus [W(l ,T) – W(l ,Tb)]e (l ), which for erature difference D T is simply: (35.5) emissivity of a wide variety of natural and man-made objects is also given in [2]. ifference between thermal imaging and visual imaging is the very low contrast. In the MWIR, calculated from Equation 35.1 due to 1 K at the target is about 4%, falling to about 2% in tmospheric Transmission at the absorption bands shown in Figures 35.2(b) and 35.2(c) are avoided, atmospheric can frequently be ignored in the laboratory or industrial context. For longer ranges, an transmission model must be used or calibrating sources must be placed at the target range. atmospheric transmission model is LOWTRAN [3], currently at version 7. The atmospheric Ta(l ) reduces the differential signal from the target proportionately, but has no effect on und flux if the atmosphere is at background temperature. Atmospheric transmission in the erely affected by high humidity, making the MWIR the band of choice for long-range the Tropics. (Many gases and vapors such as methane or ammonia have very strong in the infrared, making thermal imaging a possible means of leak detection and location.) etectors o main types of detector — photon (or quantum) and thermal. A more detailed discussion etectors is given in this handbook in Chapter 8.1.1 and 8.1.2, and of thermal detectors in 8, so only aspects unique to thermal imaging are discussed here. etectors etectors, the response is caused by photons of radiation that generate free carriers in a tor, which in turn increase the conductivity (for photoconductive detectors) or generate a ference across a junction (for photovoltaic detectors). Photovoltaic devices have the advantage ring a bias current (important to reduce the heat load on the cooling system), and they have noise because the electric field at the junction separates the carriers, thereby eliminating on noise. Whether or not the lower noise is achieved in practice depends on the read-out he photon energy in the LWIR is only about 1/20th of that of a photon in the visible region um, so a semiconductor with a much smaller bandgap than silicon must be used. The most material is a compound of mercury, cadmium, and tellurium (MCT or CMT) since not only m efficiency excellent (70% or more), but the bandgap can be tuned to the desired wavelength veband) by altering the composition. Cooling of the detector to about 80 K is desirable for ut about 120 K is acceptable for the MWIR. For the MWIR, indium antimonide (InSb) is llent material; and since it is a true stoichiometric compound, it is easier to achieve good f response, but cooling to 80 K is required. for use in scanning systems are frequently arranged so that several elements are scanned e part of the scene in rapid succession, the output of each element being delayed and added ∆ ∆W W T T Tλ ε λ λ( ) = ( ) ( )d d , ss LLC © 1999 by CRC Pre to the previ serial scanni to the squar material itse elongated st electrode ne the signal bu while diffusi Large arr bonded to a is the Schot process, and limited to th Vol. 3, p. 246 The detec a “cold shiel FIGURE 35.3 at which the i a detector ma FIGURE 35.4 match U.S. TV ous one to enhance the signal-to-noise ratio (SNR). This approach (Figure 35.3) is termed ng or “time-delay and integrate” (TDI) mode, and gives a theoretical gain in the SNR equal e root of the number of elements in TDI. It is also possible to perform TDI in the detector lf. In the SPRITE detector (Signal Processing In The Element), the sensitive element is an rip of CMT. Photons incident on the device generate carriers that drift toward a read-out ar one end. If the image is scanned along the detector at the same speed as the carrier drift, ilds up along the length of the device. The useful length is limited by carrier recombination, on of the carriers limits spatial resolution. ays of photon detectors are generally of hybrid construction, the sensitive elements being silicon CCD or CMOS addressing circuit using indium “bumps” (Figure 35.4). An exception tky barrier detector (e.g., platinum silicide), which can be manufactured by a monolithic thus tends to be lower in cost, but quantum efficiency is much lower and operation is usually e MWIR band. Detector arrays and read-out architectures are discussed in depth in [2] -341 and [4]. tor assembly is encapsulated in a Dewar as shown in Figure 35.5. In front of the detector is d” that limits the acceptance angle of the radiation to match that of the optics. Use of serial scanning to enhance signal-to-noise ratio. The delay times are chosen to match the speed mage is swept along the detector array. Serial scanning is usually combined with parallel scanning using trix. Typical hybrid detector construction. A typical element size is 30 m m. A large array of this type to standard would have 640 · 480 elements. ss LLC © 1999 by CRC Pre Thermal Thermal det a change in generally fai (although it is typically 1 The essentia blackened el dielectric ma in electrical is the therma and for good the dielectric causes the ca detailed desc change in te technique us vanadium d elements are thermal insu chopping is Detector The wavelen current that at such a h A photon–1 s FIGURE 35.5 of compresse Detectors ectors rely on the heating effect of the incoming radiation, the change in temperature causing resistance, capacitance, or electrical polarization that might be detected electrically. They are rly slow in response (several milliseconds) but have the advantage that cooling is not essential can be of considerable benefit with some types). The detectivity of uncooled thermal detectors /100 that of cooled photon detectors, so real-time imaging requires the use of staring arrays. ls of a pyroelectric array are shown in Figure 35.6. Incoming radiation is absorbed by the ectrode, and the heat generated is transferred to the pyroelectric layer, which comprises a terial that has been polarized by means of a high electric field during manufacture. The change polarization with temperature gives the electric signal. One of the most important parameters l isolation of the sensitive elements, so some kind of insulating support structure is necessary; performance, the device must be evacuated to prevent convection. In a variant of this approach, bolometer, the rapid variation of the dielectric constant at temperatures near the Curie point, pacitance of the sensitive element to change, and hence the voltage for a constant charge. A ription of this approach is given in [5]. In both techniques, the detector responds only to mperature, so it is necessary to modulate the incoming radiation using a chopper. In the ed initially by Wood [6] (now licensed to several manufacturers), the sensitive elements are ioxide coatings that undergo a large change in resistivity for a small temperature change. The supported by silicon strips that are micromachined from the substrate and give excellent lation of the element. Changes in resistivity are read out by circuitry on the substrate, and no required, but the array must be maintained at a precise and uniform temperature. Performance Measures gth-dependent power responsivity of a detector R(l ) is defined as the output potential or would result from 1 W of radiation at wavelength l , assuming that linearity was maintained igh flux level. The units are V W–1 or A W–1. Photon responsivities in V photon–1 s–1 and –1 are similarly defined. Construction of typical cooled detector. Cooling can be by liquid nitrogen, Joule-Thomson expansion d gas, or a cooling engine. ss LLC © 1999 by CRC Pre A therma of response element or t In an ide per photon) i.e., the pho given numb responsivity cut-off is spr antireflectio The sensi background incident on ment is mad effect being of detector, t B, so that defined as s usually given measure det under the co to 1/R(l ); so wavelengths the blackbod FIGURE 35.6 bolometer, bu l detector has a power responsivity that is essentially independent of wavelength, the limits being determined by the transparency of the window and the absorption spectrum of the he material used to blacken it. al photon detector, the quantum efficiency h (defined as the number of carriers generated would be constant at all wavelengths for which the photon energy is greater than the bandgap, ton responsivity is independent of wavelength up to the chosen cut-off wavelength. Since a er of Watts corresponds to a number of photons proportional to the wavelength, the power (V W–1 or A W–1) would increase linearly with wavelength until the cut-off. In practice, the ead over about 0.5 m m and shortwave performance is modified by window transmission and n coatings. tivity of a detector is limited by noise that may be due to the detector itself or due to the radiation (as is discussed later). Noise-equivalent power NEP(l ) is defined as the power the detector at wavelength l , which gives a signal equal to the rms noise when the measure- e with a 1-Hz bandwidth. The NEP depends also on the modulation frequency, the latter large for thermal detectors, but frequently negligible for quantum detectors. For many types he noise is proportional to the square root of the sensitive area Ad and the electrical bandwidth /NEP is constant. A performance figure that is proportional to sensitivity can then be pecific detectivity D*(l ) = /NEP(l ). For historical reasons, specific detectivity is in units of cm W–1, so it is important to remember to convert this to SI units or to ector area in square centimeters. Since noise is an electrical quantity particular to the detector nditions for which D* is defined and is independent of wavelength, NEP( l ) is proportional if the value of detectivity D*p at the wavelength of peak responsivity Rp is known, for other D*(l ) = D*
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