真空蒸镀仿真PEGASUS软件应用
Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 133
Vacuum evaporation
Simulation of distribution of
film thickness
(1) On rotating substrate
(2) Comparison with theoretical values
(3) Comparison with experiments regarding dependency of
Ar...
Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 133
Vacuum evaporation
Simulation of distribution of
film thickness
(1) On rotating substrate
(2) Comparison with theoretical values
(3) Comparison with experiments regarding dependency of
Argon gas pressure
bill
文本框
上海锦科信息科技有限公司
专业工程软件和技术开发服务提供商
www.btitgroup.com
info@btitgroup.com
Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 134
(1) Model
xx
yy
zz
Substrate
R=100R=100
Evaporation source :
Φ=0.2
[[cm]cm]
Absorbed wallAbsorbed wall
9090
100100
Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 135
(1) Comparison of particle fluxes
Stationary substrate
Max. :0.1245×1020
Min. :0.0075×1020
Rotating substrate
Max.:0.4276×1019
Min. :0.3802×1019
Unit:[/mUnit:[/m2/s]/s]
Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 136
Substrate
Flow
out
Evaporation source
1) Point
2) Surface(5mm square)
[cm]
Material:Al
Temperature:1000 [K]
Flux: 1.8×1017 [#/cm2/s]
(2) Model
Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 137
(2) Distribution of film thickness
Point source
Substrate
θ
A
dω
O
r0
θ
r
Φ
Small surface source
cos3θ cos4θ (Φ=θ)
Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 138
(2) Distribution of particle flux and pressure
Point source Small surface source
Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 139
(2) Distribution of particle flux
θ
膜
厚
分
布
膜
厚
分
布
AngleAngle
pointpoint small surfacesmall surface
Fi
lm
th
ic
kn
es
s
Fi
lm
th
ic
kn
es
s
Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 140
(3) Equipment/Model
Experiment by
Associate Prof.
M. Nakamura
Faculty of engineering
Chiba Univ.
MassMass ::197amu197amu
DiameterDiameter ::174pm ( 1.74174pm ( 1.74ÅÅ))
TemperatureTemperature::14001400℃℃ (1673 [K] )(1673 [K] )
FluxFlux ::0.874mg/sec (2.6565 X100.874mg/sec (2.6565 X101818 [#/sec] )[#/sec] )
Blue colored wallBlue colored wall
isis
partition wallpartition wall
SubstrateSubstrateSurfaceSurface
evaporation sourceevaporation source
EnlargementEnlargement
Center lineCenter line
Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 141
11.15 C
B
A
A = 1.7
B = 0.7
C = 0.85
Unit:cm
24
12
1212
Symmetric boundary
X
Z
Y
Half model in
Y-direction
Evaporation
surface
Substrate
13
7.5 8
(3) Model
Absorbed wall except
symmetric and inflow
boundary
PartitionPartition
wallwall
Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 142
11.15
Unit:cm
24
12
1212
X
Z
Y
Substrate
2.05
X
Observed point
(3) Observed point of film thickness
24
Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 143
(3)Comparison with simulation and experiment
of film thickness
RGS3D
Ar gas pressure dependencyAr gas pressure dependency
N
or
m
al
ize
d
by
m
ax
im
um
va
lu
e
N
or
m
al
ize
d
by
m
ax
im
um
va
lu
e
Ar gas pressure [Pa]Ar gas pressure [Pa]
Exp.Exp.
In this simulation,In this simulation,
gas flow of Ar is neglected.gas flow of Ar is neglected.
So there are slightly differences.So there are slightly differences.
Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 144
(3)Distribution of speed of incident particles to substrate
Speed of incident particles [m/s]Speed of incident particles [m/s]
Frequency distribution of speedFrequency distribution of speed
Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 145
(3)Spatial distribution of density,pressure, etc.
DensityDensity
TemperatureTemperature
PressurePressure
Particle flux and VelocityParticle flux and Velocity
Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 146
Emission coeff. and emitted angular dist.Emission coeff. and emitted angular dist.
Emitted angular dist.Emitted angular dist. Emitted angular dist.Emitted angular dist.
Emitted angleEmitted angle Emitted angleEmitted angle
Pr
ob
ab
ili
ty
Pr
ob
ab
ili
ty
Pr
ob
ab
ili
ty
(N
or
m
al
iz
ed
)
Pr
ob
ab
ili
ty
(N
or
m
al
iz
ed
)
Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 147
Emission coeff. And speed dist.Emission coeff. And speed dist.((Al 1000[K]Al 1000[K]))
Speed distributionSpeed distribution Speed distributionSpeed distribution
Pr
ob
ab
ili
ty
Pr
ob
ab
ili
ty
Pr
ob
ab
ili
ty
(N
or
m
al
iz
ed
)
Pr
ob
ab
ili
ty
(N
or
m
al
iz
ed
)
Speed [m/s]Speed [m/s] Speed [m/s]Speed [m/s]
Copyright 2002-2011 PEGASUS Software Inc., All rights reserved. 148
Substrate
Domain :100mm cubic
Evaporation source :47.5
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