GT多晶铸锭炉通用操作手册

GT Solar Incorporated DirectionalSolidification System(DSS) User Instruction Manual Directional Solidification System (DSS)Green Energy TechnologyPN 513299 Rev. 2.2Printed March, 2007 243 Daniel Webster HighwayMerrimack, NH 03054, USAPhone: + 1 603 883 5200Fax: + 1 603 598 0444Web: www.gtsolar.com Contents - 1Directional Solidification System Contents Preface...................................................................i Text References..........................................................................................................i Safety Considerations..........................................................................................................ii Safety Symbols.........................................................................................................iiLocal Codes and Standards.......................................................................................iiDocumentation...........................................................................................................iiSafety Precautions...................................................................................................iiiEquipment Hazards...................................................................................................ivHigh Voltage Precautions..........................................................................................ivCompressed Air Precautions.....................................................................................ivLockout/Tagout...........................................................................................................vLockout/Tagout Procedures........................................................................................vElectrical Equipment Lockouts...................................................................................vi DSS Facilities Specifications......................................................................................viiDSS Facility Layout Drawing.....................................................................................viii System Overview...........................................1 - 1 Introduction.............................................................................................................1 - 1Theory of Operation and Process...........................................................................1 - 1System Hardware....................................................................................................1 - 2 Furnace Chamber.................................................................................................1 - 2Hot Zone...............................................................................................................1 - 2Vacuum Pump System..........................................................................................1 - 3Power Supply.......................................................................................................1 - 3Control Console....................................................................................................1 - 4Operator Control Console......................................................................................1 - 4 GT Solar IncorporatedContents - 2 Contents Operating Screens...................................................................................................1 - 4Alarms Button..........................................................................................................1 - 5 Alarms Screen......................................................................................................1 - 5Power Loss/Phase Loss Screen............................................................................1 - 6End Trigger Disabled Button..................................................................................1 - 7Contactor Failure Screen......................................................................................1 - 7Contactor Failure Button.......................................................................................1 - 7 Overview Button......................................................................................................1 - 8 Overview Screen...................................................................................................1 - 8Detail Screens......................................................................................................1 - 9Gas Out Detail Screen................................................................................1 - 9Gas In Detail Screen...................................................................................1 - 9PID Temperature Detail Screen...................................................................1 - 9Pressure Detail Screen.............................................................................1 - 10Position Detail Screen..............................................................................1 - 10 Modes Button........................................................................................................1 - 11 ModesScreen.....................................................................................................1 - 11Advance to Next Step Button...............................................................................1 - 12Do your really want to Abort Screen....................................................................1 - 12 Master Parameters Screen..........................................................................................1 - 13 PID Values Screen.............................................................................................1 - 13 Manual Button..............................................................................................................1 - 14 Manual Screen (with Password Access)..............................................................1 - 14 Pumpdown screen.......................................................................................................1 - 15 Recipe Button........................................................................................................1 - 16 Recipe Screen.............................................................................................................1 - 16 Manual Button.......................................................................................................1 - 17 Manual Screen.............................................................................................................1 - 17Real Values Screen.....................................................................................................1 - 18 Manual Insulation Screen....................................................................................1 - 18Manual Insulation Screen (with “Homing” Routine)...............................................1 - 20 Plot Data Button....................................................................................................1 - 21 Plot Data Screens...............................................................................................1 - 21Melt and Growth End Screen...............................................................................1 - 22Power Profiles Screen........................................................................................1 - 22Power Profiles Mode/Step Screen.......................................................................1 - 23Mode/Step Screen - Mode Step Invalid................................................................1 - 24Accept/Do Not Accept Power Profile...................................................................1 - 24 Directional Solidification System Contents - 3 Contents Furnace Operation.........................................2 - 1 General Description.................................................................................................2 - 1 Opening the chamber................................................................................2 - 2 Manual screen...............................................................................................................2 - 2 RemoveClamp Warning Screen.............................................................................2 - 2Lower Chamber Lift Screen..................................................................................2 - 3 Removing the grown ingot........................................................................2 - 4 Manual Insulation Screen......................................................................................2 - 4 Loading a new Silicon Charge.................................................................2 - 8 Securing support plates with studs.......................................................................2 - 11Manual Insulation Screen....................................................................................2 - 16Base Pressure and Outgas Timers......................................................................2 - 17 Running an Auto Cycle..........................................................................................2 - 18 Loading a Recipe................................................................................................2 - 18Pumpdown Checklist Screen...............................................................................2 - 19Water_Fail_in Pump (part of Pumpdown Checklist screen)..................................2 - 19Base_Pressure_Fail (part of Pumpdown Checklist screen)..................................2 - 20Leak_Rate_Fail (part of Pumpdown Checklist screen)..........................................2 - 20 Automated Run Sequence.....................................................................................2 - 21 Insulation Did Not Reach Lower Limit..................................................................2 - 21Melt End Screen.................................................................................................2 - 22Plot Data Screen................................................................................................2 - 22Melt and Growth End Trend Screen.....................................................................2 - 23Center Growth End Screen.................................................................................2 - 23 Monitoring the Automated Cycle:..........................................................2 - 25 Overview Screen.........................................................................................................2 - 25Paused For 30 Minutes Screen...................................................................................2 - 25 Responding to Alarms:............................................................................2 - 26 Alarms Screen....................................................................................................2 - 26Alarms Lights......................................................................................................2 - 26 Adjusting Operating Conditions and Jumping between Steps:........2 - 27 Real Values Screen............................................................................................2 - 27Changing Step Time or Jumping to New Step......................................................2 - 28 Aborting an Automated Run:..................................................................2 - 29 GT Solar IncorporatedContents - 4 Contents Aborting Auto Mode............................................................................................2 - 29 Aborting from Emergency Cool:............................................................2 - 30 Aborting Emergency Cool...................................................................................2 - 30 Thermocouple Failure:...........................................................................2 - 31 Upper Thermocouple (TC1) Failure Screen.........................................................2 - 31Load Profile Button.............................................................................................2 - 31DS-Block Thermocouple Failure Screen..............................................................2 - 31Reset Upper Thermocouple (part of Overview Screen).........................................2 - 32TC Failure at Start Auto.......................................................................................2 - 32 Furnace Over-Temperature:..................................................................2 - 32 Over-Temperature Screen (-DS-Block Thermocouples)........................................2 - 32 Silicon Spill Warning:...............................................................................2 - 33 Silicon Spill Warning Screen...............................................................................2 - 33 Measuring the Growth of an Ingot:.......................................................2 - 34 Advanced Functions.....................................A - 1 Control Loops.........................................................................................................A - 2 Real Values screen........................................................................................................A - 2 Power................................................................................................................................A - 2Temperature......................................................................................................................A - 2Vacuum.............................................................................................................................A - 3Gas....................................................................................................................................A - 3Inlet....................................................................................................................................A - 3Outlet.................................................................................................................................A - 3 Sequence of events during a DSS Growth Run:..........A - 3 Heat...................................................................................................................................A - 4Melt....................................................................................................................................A - 4Growth...............................................................................................................................A - 5Anneal...............................................................................................................................A - 6Cooldown..........................................................................................................................A - 6 Recipe Development and Modification.........................A - 8Recipe Definitions:..........................................................A - 8 Directional Solidification System Contents - 5 Contents Recipe Creation and Development:...............................A - 9 Recipe screen page 1 (with typical values)...................................................................A - 10Recipe screen page 2.................................................................................................A - 11Recipe screen page 3.................................................................................................A - 11 Enter String screen.............................................................................................A - 12 Enter String Confirm screen.........................................................................................A - 12 Entered string short............................................................................................A - 13Enter string nonvalid...........................................................................................A - 13 Master Parameter Definitions:......................................A - 14 Master Parameters P1................................................................................................A - 14Master Parameters P2................................................................................................A - 14 Troubleshooting Section:............................................A - 21 Alarms Screen.............................................................................................................A - 21 Alarm functions:............................................................A - 21Data-log function:..........................................................A - 26 Variables logged:.....................................................................................A - 27 GT Solar IncorporatedContents - 6 Contents i Directional Solidification System This manual contains the information necessary to operate the GT SolarDirectional Solidification System (DSS furnace). This information isessential for the efficient use of the furnace, and must be read andunderstood to avoid problems. This operating manual is intended as a guide for operators using the automaticfeatures of the DSS to run production ingot growth cycles. It also gives someinformation about process development and advanced troubleshooting using themanual control features of the system, but the main emphasis is on typical automaticoperation. The use of the Manual operating control screen is password-protectedduring Auto mode and is reserved for service and engineering technicians. Advancedfunctions are discussed in Appendix A.This manual consists of:Preface:‧Safety Considerations‧Facilities/layout specificationsChapter 1:System Overview‧Introduction‧Theory of Operation and Process‧System Hardware‧Operating ScreensChapter 2:Furnace OperationChapter 3: Appendix A: Advanced FunctionsReferences to buttons or values displayed on the operator interface screens areshown using Upper Case characters at the start of the word(s) in the descriptionsof the operating procedures and other instructions. Preface Text References ii Preface GT Solar Incorporated Conventions used in this manual: Safety Considerations STATEMENTS THAT INDICATE A POTENTIALLY HAZARDOUSSITUATION WHICH COULD RESULT IN SERIOUS INJURY. YOUSHOULD NOT PROCEED UNTIL YOU HAVE THOROUGHLYREAD AND HAVE UNDERSTOOD THE WARNING INFORMATION STATEMENTS THAT INDICATE A HAZARDOUS SITUATIONWHICH WILL RESULT IN DEATH OR SERIOUS INJURY, IF NOTAVOIDED. ONLY FULLY QUALIFIED PERSONNEL SHOULDATTEMPT TO RECTIFY THE HAZARD CONDITION. GIVES INFORMATION ABOUT A SITUATION OR CONDITIONTHAT COULD RESULT IN EQUIPMENT MALFUNCTION, MOD-ERATE INJURY OR LOST DATA. DESCRIBES IMPORTANT RELATED INFORMATION, REMIND-ERS, RECOMMENDATIONS AND SUGGESTIONS. The following symbols are used throughout this manual to draw attention to specialinformation or warn of potential hazards. Customers are responsible for informingoperators, maintenance, and installation personnel of the symbol’s meaning andensure that the symbols are satisfactorily comprehended. The generic definition tothe right of each symbol indicates the severity of the hazard or warning.These safety symbols are be used to clarify, supplement or substitute for a portionor the entire word message found to the right of the symbol. A list of safety definitionsand symbols throughout the manual are listed below. The terms and definition areconsistent with ANSI Z 535.4 (Product Safety Sign Labels), ISO 3864 (SafetyColours and Safety Signs), and IEC 60417 (Graphical Symbols for Use onEquipment) guidelines, but the text may be modified to explain the nature of thespecific hazard or information notice.Each customer is responsible for ensuring that the design, facilities layout/connectionsand process conditions conform to local codes and standards.Documentation for the Directional Solidification System consist