Corning HPFS Fused Silica

Semiconductor Optics HPFS® Fused Silica ArF Grade HPFS® ArF Grade, Corning code 7980, is a high purity synthetic amorphous silicon dioxide manufactured by flame hydrolysis. The noncrystalline, colorless, silica glass combines a very low thermal expansion coefficient with excellent optical qualities and exceptional transmittance in the deep ultraviolet. ArF Grade was developed for 193 nm lithography systems. In order to satisfy the challenging quality requirements of our customers in leading edge applications such as microlithography, Corning is dedicated to continuous improvement. Our investments in research and develop- ment, combined with Corning’s quality systems, support our technology leadership position and ensure that we meet our customer’s requirements on time, every time. NOTES: 1. Defines the sum of the cross section in mm2 of inclusions per 100 cm3 of glass. Inclusions with a diameter ≤ 0.10 mm are disregarded. 2. Refers to the diameter of the largest single inclusion. 3. Index homogeneity: the maximum index variation (relative), measured over the clear aperture of the blank. 4. Index homogeneity is certified using an interferometer at 632.8 nm. The numerical homogeneity is reported as the average through the piece thickness. Blanks with diameter up to 450 mm can be analyzed over the full aperture. Larger parts can be analyzed using multiple overlapping apertures. The minimum thickness for index homogeneity verification is 20 mm. For thinner parts, the parent piece is certified. Quality Grade Selection Chart—HPFS® ArF Grade Corning defines and certifies the quality of HPFS® glass using two criteria: inclusions and homogeneity grade. Inclusion Class Homogeneity 3,4 ppm Grade Total inclusion1 Maximum2 AA A C F Class cross section [mm2] size [mm] ≤ 0.5 ≤ 1 ≤ 2 ≤ 5 0 ≤ 0.03 0.10 ■ ■ ■ ■ 1 ≤ 0.10 0.28 ■ ■ ■ 2 ≤ 0.25 0.50 ■ ■ Chemical durability and Impurities Solution Time Weight Loss Impurities [mg/cm2] 5% HCL by weight @95 ºC 24 h < 0.010 OH content (by weight): 800 – 1000 ppm 5% NaOH @95 ºC 6 h 0.453 Impurities other than OH: <100 ppb 0.02N NA2CO3 @95 ºC 6 h 0.065 0.02N H2SO4 @95 ºC 24 h < 0.010 Deionized H2O @95 ºC 24 h 0.015 10% HF by weight @25 ºC 20 m 0.230 10% NH4F*HF by weight @25 ºC 20 m 0.220 Softening Point 1585 ºC (107.6 poises) Annealing Point 1042 ºC (1013 poises) Strain Point 893 ºC (1014.5 poises) Thermal Conductivity 1.30 W/m K Thermal Diffusivity 0.0075 cm2/s Average C.T.E. 0.52 ppm/K 5 ºC-35 ºC 0.57 ppm/K 0 ºC-200 ºC 0.48 ppm/K -100 ºC-200 ºC Mechanical & Thermal Properties Unless otherwise stated, all values @25 ºC Elastic (Young’s) Modulus 72.7 GPa Shear Modulus 31.4 GPa Average Modulus of Rupture, abraded 52.4 MPa Bulk Modulus 35.4 GPa Poisson’s Ratio 0.16 Density 2.201 g/cm3 Knoop Hardness (100 g load) 522 kg/mm2 HPFS® ArF Grade is certified to meet Ti ≥ 99.5%/cm@193nm.Higher transmittance is available upon request. A typical internal transmittance curve for HPFS® ArF Grade fused silica is shown here. 100.00 99.90 99.80 99.70 99.60 99.50 T i[ % /c m ] 180 200 220 240 260 280 300 320 340 360 380 400 wavelength [nm] Internal transmittance Refractive index and dispersion Data in 22 ºC in 760mm Hg dry nitrogen gas Wavelength Refractive Thermal [air] Index *2 Coefficient λ [nm] n ∆n/∆T*3 (ppm/K) 1128.64 1.448870 9.6 1064.00 1.449633 9.6 1060.00 1.449681 9.6 1013.98 nt 1.450245 9.6 852.11 ns 1.452469 9.7 706.52 nr 1.455149 9.9 656.27 nC 1.456370 9.9 643.85 nC´ 1.456707 10.0 632.80 nHe-Ne 1.457021 10.0 589.29 nD 1.458406 10.1 587.56 nd 1.458467 10.1 546.07 ne 1.460082 10.2 486.13 nF 1.463132 10.4 479.99 nF´ 1.463509 10.4 435.83 ng 1.466701 10.6 404.66 nh 1.469628 10.8 365.01 ni 1.474555 11.2 334.15 1.479785 11.6 312.57 1.484514 12.0 308.00 1.485663 12.1 248.30 1.508433 14.2 248.00 1.508601 14.2 214.44 1.533789 17.0 206.20 1.542741 18.1 194.17 1.559012 20.4 193.40 1.560208 20.5 193.00 1.560841 20.6 184.89 1.575131 22.7 Polynomial Dispersion Equation Constants *1 A0 2.104025406 A1 -1.456000330 x 10-4 A2 -9.049135390 x 10-3 A3 8.801830992 x 10-3 A4 8.435237228 x 10-5 A5 1.681656789 x 10-6 A6 -1.675425449 x 10-8 A7 8.326602461 x 10-10 Sellmeier Dispersion Equation Constants *2 B1 0.68374049400 B2 0.42032361300 B3 0.58502748000 C1 0.00460352869 C2 0.01339688560 C3 64.49327320000 ∆n/∆T Dispersion Equation Constants *3 C0 9.390590 C1 0.235290 C2 -1.318560 x 10-3 C3 3.028870 x 10-4 Other Optical Properties νd 67.79 νe 67.64 nF -nC 0.006763 nF´-nC´ 0.006802 Stress Coefficient 35.0 nm/cm MPa Striae ISO 10110-4 Class 5/Thickness Direction Birefringence ≤ 1nm/cm, lower specifications available *1 Polynomial Equation: n2 = A0 + A1 λ4 + A2 λ2 + A3 λ-2 + A4 λ-4 +A5 λ-6 + A6 λ -8 + A7 λ-10 with λ in µm *2 Sellmeier Equation: n2-1 = B1 λ2/(λ2-C1) + B2 λ2/(λ2-C2) + B3 λ2/(λ2-C3) with λ in µm *3 ∆n/∆T Equation (20–25ºC) = C0 + C1 λ-2 + C2 λ-4 + C3 λ-6 with λ in µm Resistance to laser damage Samples of HPFS® ArF Grade are regularly tested at Corning’s Metrology Laboratory, Sullivan Park Research Center, to maintain the high standards to which Corning is committed. Corning Incorporated One Riverfront Plaza Corning, NY 14831 607 974 9000 © Corning Incorporated 2003 HPFS® is a registered trademark of Corning Incorporated. www.corning.com September 30, 2003 We are here to help you specify the best product for your application. For further information, please contact: Worldwide Accessibility United States/Canada Sales Office Corning Incorporated Semiconductor Materials Business 334 County Route 16 Canton, NY 13617 t: 315.379.3600 f: 315.379.3317 e-mail: hpfs@corning.com European Sales Office Corning GmbH Corning International Abraham-Lincoln-Strasse 30 D-65189 Wiesbaden, Germany t: 49.611.7366.100 f: 49.611.7366.143 e-mail: CIgermany@corning.com Asia Sales Offices Corning International K.K. No. 35 Kowa Building, 3F 14-14, Akasaka 1-chome Minato-Ku, Tokyo 107-0052 Japan t: 81.3.3586.1052 f: 81.3.3587.0906 Corning International 1 Kim Seng Promenade #12-12 GreatWorld City West Tower Singapore 237994 Republic of Singapore t: 65.733.6511 f: 65.861.7310 Corning Korea Company Ltd. 10th Floor, Kukje Center Bldg. 191, Hangangro 2-Ka Yongsan-Ku Seoul, Korea 140-702 t: 82.2.796.9500 f: 82.2.796.9300 Corning Glass Taiwan Co. Ltd. Room # 1023, 12F No. 205 Tun Hua North Road Taipei, Taiwan t: 886.2.2716.0338 f: 886.2.2716.0339 Australia Sales Office Corning International Australia Suite 18 12, Tryon Road Lindfield, NSW 2070 Australia t: 61.2.9416.0492 f: 61.2.9416.0493 World Headquarters Corning Incorporated 1 Riverfront Plaza Corning, New York 14831-0001 t: 607-974-9000 The information contained herein is based upon data considered to be accurate. However, no warranty is expressed or implied regarding the performance of this product. The only applicable warranties are those that are set out in a contract or purchase.