气体流量计算表

1l/min＝0.06m3/hrBulkGas一般流速为10m/s(压力7.5kg/cm2);Ar、He<10~15m/s;SiH4、PH3<5m/s;CO2、NH3<1~5m/sSpecialGas:NH3、N2O、HCL、BCL3、HF、HBr、SF6等液态气体，流速应小于1m/s一般气态钢瓶10m/s，液态钢瓶则蒸汽压愈低，流速要愈慢，否则管件上将生结露现象，影响Regulator的准确性LPMFlow(Q)LPM(l/min)73.0209.8364.7871.61705.22825.94228.25912.17877.512277.518099.425047.633122.142322.842322.862878.888933.4154998.8m3/hrFlow(Q)m3/hr4.412.621.952.3102.3169.6253.7354.7472.6736.61086.01502.91987.32539.42539.43772.75336.09299.9kg/cm2Pressure(P)kg/cm2777777777777777777tTemperature(T)°252525252525252525252525252525252525TubeO.D(mm)T(mm)I.D(mm)A(m2)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)1/4"6.350.8894.5720.000016417360713610.4029.9051.97124.20243.00402.70602.53842.481122.561749.572579.213569.344719.976031.096031.098960.3712673.2122087.673/8"9.530.8897.7520.00004719743804163.6210.4018.0843.2084.53140.08209.59293.05390.47608.58897.161241.571641.812097.882097.883116.814408.307683.071/2"12.71.2410.220.000082033773362.085.9810.4024.8648.6380.59120.58168.61224.66350.14516.17714.33944.601207.001207.001793.232536.284420.393/4"19.11.6515.80.00019606730.872.504.3510.4020.3533.7250.4570.5494.00146.50215.97298.87395.22505.00505.00750.281061.171849.471"25.41.6522.10.00038359720.451.282.225.3210.4017.2425.7936.0648.0474.88110.39152.76202.01258.12258.12383.49542.39945.3211/4"31.751.6528.450.00063570470.270.771.343.216.2810.4015.5621.7628.9945.1866.6192.18121.90155.76155.76231.41327.29570.4211/2"38.11.6534.80.00095115080.180.520.902.144.196.9510.4014.5419.3830.2044.5261.6181.47104.10104.10154.66218.75381.2413/4"44.451.6541.150.00132993550.130.370.641.533.004.977.4410.4013.8621.6031.8444.0658.2774.4574.45110.61156.44272.662"50.81.6547.50.00177205880.100.280.481.152.253.735.587.8110.4016.2123.9033.0743.7355.8855.8883.01117.41204.6321/2"63.52.159.30.00276185120.060.180.310.741.442.393.585.016.6710.4015.3321.2228.0635.8535.8553.2675.33131.303"76.22.1720.00407151360.040.120.210.500.981.622.433.404.537.0510.4014.3919.0324.3224.3236.1351.1089.0631/2"88.92.184.70.00563453030.030.090.150.360.711.171.762.453.275.107.5210.4013.7517.5717.5726.1136.9364.364"101.62.197.40.00745090130.020.070.110.270.540.891.331.862.473.865.687.8610.4013.2913.2919.7427.9248.6741/2"114.32.1110.10.00952062670.020.050.090.210.420.691.041.451.943.024.456.158.1410.4010.4015.4521.8538.09100A114.32.1110.10.00952062670.020.050.090.210.420.691.041.451.943.024.456.158.1410.4010.4015.4521.8538.09125A139.82.8134.20.01414477130.010.030.060.140.280.470.700.981.302.032.994.145.487.007.0010.4014.7125.64150A165.22.8159.60.02000583450.010.020.040.100.200.330.490.690.921.442.122.933.874.954.957.3510.4018.13200A216.32.8210.70.03486743240.000.010.020.060.110.190.280.400.530.821.211.682.222.842.844.225.9710.40Note:1kg/cm2≈1atmLPMFlow(Q)LPM(l/min)49.6148.7300.2654.61280.7887.71497.82471.34070.55380.98579.213630.918900.424875.631785.547223.766791.4116408.3m3/hrFlow(Q)m3/hr3.08.918.039.376.853.389.9148.3244.2322.9514.8817.91134.01492.51907.12833.44007.56984.5kg/cm2Pressure(P)kg/cm2555555555555555555tTemperature(T)°252525252525252525252525252525252525TubeO.D(mm)T(mm)I.D(mm)A(m2)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)LV(m/s)1/4"6.3514.351.49E-0510.4033.0357.41137.20268.44444.86665.60930.671240.061932.702849.183942.955214.026662.386662.389898.2813999.7624399.673/8"9.5317.534.45E-053.8310.4019.1645.7989.58148.46222.13310.59413.84644.99950.841315.861740.052223.402223.403303.304672.078142.781/2"12.7110.78.99E-051.905.4610.4022.6844.3773.52110.01153.82204.95319.43470.90651.68861.751101.131101.131635.952313.834032.693/4"19.11.6515.81.96E-040.872.504.3510.4020.3533.7250.4570.5494.00146.50215.97298.87395.22505.00505.00750.281061.171849.471"25.41.6522.13.84E-040.451.282.225.3210.4017.2425.7936.0648.0474.88110.39152.76202.01258.12258.12383.49542.39945.3215A21.71.6518.42.66E-040.641.853.217.6715.0010.4037.2052.0269.31108.02159.24220.38291.42372.37372.37553.23782.461363.7220A27.21.6523.94.49E-040.381.091.904.558.8914.7410.4030.8341.0864.0294.38130.62172.73220.71220.71327.90463.77808.2925A341.6530.77.40E-040.230.661.152.755.398.9313.3610.4024.9038.8057.2079.16104.68133.76133.76198.73281.08489.8832A42.71.6539.41.22E-030.140.400.701.673.275.428.1111.3410.4023.5634.7348.0663.5681.2181.21120.66170.65297.4240A48.61.6545.31.61E-030.110.300.531.272.484.106.148.5811.4310.4026.2736.3648.0861.4361.4391.27129.09224.9950A60.51.6557.22.57E-030.070.190.330.791.552.573.855.387.1711.1810.4022.8030.1538.5338.5357.2580.97141.1165A76.32.172.14.08E-030.040.120.210.500.981.622.423.394.517.0410.3710.4018.9824.2524.2536.0350.9688.8280A89.12.184.95.66E-030.030.090.150.360.701.171.752.443.265.077.4810.3510.4017.4917.4925.9936.7564.0590A101.62.197.47.45E-030.020.070.110.270.540.891.331.862.473.865.687.8610.4010.4013.2919.7427.9248.67100A114.32.1110.19.52E-030.020.050.090.210.420.691.041.451.943.024.456.158.1410.4010.4015.4521.8538.09125A139.82.8134.21.41E-020.010.030.060.140.280.470.700.981.302.032.994.145.487.007.0010.4014.7125.64150A165.22.8159.62.00E-020.010.020.040.100.200.330.490.690.921.442.122.933.874.954.957.3510.4018.13200A216.32.8210.73.49E-020.000.010.020.060.110.190.280.400.530.821.211.682.222.842.844.225.9710.40