JEDEC标准\JESD625-A Requirements for Handling Electrostatic-Dicharge-Sensitive(ESDS)Devices

JEDECSTANDARDRequirementsforHandlingElectrostatic-Discharge-Sensitive(ESDS)DevicesJESD625-A(RevisionofEIA-625)DECEMBER1999ELECTRONICINDUSTRIESALLIANCEJEDECSolidStateTechnologyAssociationNOTICEEIA/JEDECstandardsandpublicationscontainmaterialthathasbeenprepared,reviewed,andapprovedthroughtheJEDECBoardofDirectorslevelandsubsequentlyreviewedandapprovedbytheEIAGeneralCounsel.EIA/JEDECstandardsandpublicationsaredesignedtoservethepublicinterestthrougheliminatingmisunderstandingsbetweenmanufacturersandpurchasers,facilitatinginterchangeabilityandimprovementofproducts,andassistingthepurchaserinselectingandobtainingwithminimumdelaytheproperproductforusebythoseotherthanJEDECmembers,whetherthestandardistobeusedeitherdomesticallyorinternationally.EIA/JEDECstandardsandpublicationsareadoptedwithoutregardtowhetherornottheiradoptionmayinvolvepatentsorarticles,materials,orprocesses.BysuchactionJEDECdoesnotassumeanyliabilitytoanypatentowner,nordoesitassumeanyobligationwhatevertopartiesadoptingtheEIA/JEDECstandardsorpublications.TheinformationincludedinEIA/JEDECstandardsandpublicationsrepresentsasoundapproachtoproductspecificationandapplication,principallyfromthesolidstatedevicemanufacturerviewpoint.WithintheJEDECorganizationthereareprocedureswherebyanEIA/JEDECstandardorpublicationmaybefurtherprocessedandultimatelybecomeanANSI/EIAstandard.Noclaimstobeinconformancewiththisstandardmaybemadeunlessallrequirementsstatedinthestandardaremet.Inquiries,comments,andsuggestionsrelativetothecontentofthisEIA/JEDECstandardorpublicationshouldbeaddressedtoJEDECSolidStateTechnologyAssociation,2500WilsonBoulevard,Arlington,VA22201-3834,(703)907-7560/7559orwww.jedec.orgPublishedby©ELECTRONICINDUSTRIESALLIANCE1999EngineeringDepartment2500WilsonBoulevardArlington,VA22201-3834Thisdocumentmaybedownloadedfreeofcharge,howeverEIAretainsthecopyrightonthismaterial.Bydownloadingthisfiletheindividualagreesnottochargeorreselltheresultingmaterial.PRICE:PleaserefertothecurrentCatalogofJEDECEngineeringStandardsandPublicationsorcallGlobalEngineeringDocuments,USAandCanada(1-800-854-7179),International(303-397-7956)PrintedintheU.S.A.AllrightsreservedPLEASE!DON”TVIOLATETHELAW!ThisdocumentiscopyrightedbytheElectronicIndustriesAllianceandmaynotbereproducedwithoutpermission.Organizationsmayobtainpermissiontoreproducealimitednumberofcopiesthroughenteringintoalicenseagreement.Forinformation,contact:JEDECSolidStateTechnologyAssociation2500WilsonBoulevardArlington,Virginia22201-3834orcall(703)907-7559JEDECStandardNo.625-AREQUIREMENTSFORHANDLINGELECTROSTATIC-DISCHARGE-SENSITIVE(ESDS)DEVICESCONTENTSPage1Purpose12Scope12.1Applicableusers12.2Applicableparttypes13Relateddocuments23.1Applicabledocuments24Termsanddefinitions35Inspection,measuringandtestequipment55.1Calibrationsystem55.2Recommendedinspection,measuringandtestequipmenttypes56FacilitiesforESDprotectedareasandworkstations66.1Minimumacceptablerequirements66.2ESDitemcheckrecords96.3Personnelgrounding96.4WriststrapandESDprotectivefootwearresistancepathchecks116.4.1Wriststrapresistancemeasurementpath116.4.2Heel/toestrapandconductiveshoeresistancemeasurementpaths116.4.3Wriststrapmonitor116.5Electrostaticpotentialmeasurements116.6ESDsignsandlabels116.6.1Signcontentandposting116.6.2ESDcautionlabelsforpackingandshipping116.6.3PackageESDcautionlabelcontent126.6.4CommercialdevicepackageESDcautionlabel126.6.5MilitarydevicepackageESDcautionlabel127GroundingforprotectionofESDSdevices127.1ESDground127.1.1EarthandequipmentESDgrounds137.1.2Equipmentgroundingreceptacleandconductortesting137.2ESDgroundsystemsafetyreview137.3ESDprotectedworkstationESDground137.4ESDprotectedworksurfaces137.4.1StaticdissipativeESDprotectiveworksurfaces137.4.2ConductiveESDprotectiveworksurfaces137.5ESDprotectiveflooring/mats147.6ESDgroundconnections14-i-JEDECStandardNo.625-AREQUIREMENTSFORHANDLINGELECTROSTATIC-DISCHARGE-SENSITIVE(ESDS)DEVICESCONTENTS(continued)Page7.7Groundwiremechanicalconsiderations147.8Storageareas147.9MobileESDprotectedworkstation148ESDpackagingrequirementsforESDSdevices148.1ESDdeviceprotectivepackagingrequirement148.2Packingandfillermaterials148.3Antistatictubes,trays,magazinesandcarriers158.4IndividualFinisheddevicecarriermaterials158.5ESDSdevicewaferanddiepacking158.6ESDSdeviceshippingandreceivingoperations159Complianceverification159.1ESDcoordinator159.2Auditing159.3Noncompliance159.3.1NoncompliantESDprotectedareasandworkstations169.3.2MishandledESDSdevice169.3.3ReturningrejectedESDSdevicestosuppliers169.4Records1610ESDhandlingtraining1610.1Trainingprogram1610.2Trainingrecords1611Methodsforminimizingstaticcharging1711.1Antistaticsolution1711.2Relativehumiditycontrol1711.3Airionizers1711.4ESDprotectivesmocks1811.5Gloves/fingercots18ESDhandlingauditchecklist19AnnexA-Informationalreferencedocuments22Figure1-ESDprotectedworkstation8Figure2-ExampleofESDprotectedpackagecautionlabel12Table1-MinimumrequirementsforESDprotectedareas,workstations,andtools7Table2-ESDprotectiveitemchecks9-ii-JEDECStandardNo.625-AForewordThisstandardwaspreparedtostandardizetherequirementsforacomprehensiveElectrostaticDischarge(ESD)controlprogramforhandlingESD-Sensitive(ESDS)devices.Therequirementswithinthisstandardwerederivedfromexistingindustrystandards,specifications,testmethods,andinputfromvariousindustryreviews.TheintentofthisdocumentisforuserstoincorporatetheseminimalrequirementsintotheirESDcontrolprogramtoprovideaconsistentESDprotectionlevelfortheirproducts.ThisstandardreplacesJEDECStandardNo.42(formerlyJEDECPublication108-B,DistributorRequirementsforHandlingElectrostatic-DischargeSensitive(ESDS)Devices).-iii-JEDECStandardNo.625-A-iv-JEDECStandardNo.625-APage1REQUIREMENTSFORHANDLINGELECTROSTATIC-DISCHARGE-SENSITIVE(ESDS)DEVICES(FromJEDECBoardballotJCB-98-134,formulatedunderthecognizanceofJEDECJC-14.1CommitteeonReliabilityTestMethodsforPackagedDevicesandtheJC-13CommitteeonGovernmentLiaison.)1PurposeThisstandardestablishestheminimumrequirementsforElectrostaticDischarge(ESD)controlmethodsandmaterialsusedtoprotectelectronicdevicesthataresusceptibletodamageordegradationfromelectrostaticdischarge(ESD).Thepassageofastaticchargethroughanelectrostatic-discharge-sensitive(ESDS)devicecanresultincatastrophicfailureorperformancedegradationofthepart.DevicesensitivitytoESDisdeterminedbytestmethodssuchasJESD22-A114.ESDSdeviceswithhumanbodymodelsensitivitiesoflessthan±200voltsmayneedadditionalprotectivemeasuresbeyondthosespecifiedinthisstandard.2Scope2.1Applicableusersa)SemiconductorManufacturers-fromwaferelectricalprobethroughshipmentoffinisheddevicesexceptforin-processoperationswhenallleadsareshortedtogether.NOTE—Therequirementsofthisstandardarenotimposedpriortoprobe.Priortoprobe,themanufacturershouldtakeappropriateESDprecautionstominimizedamagetodevices.b)SemiconductorDistributors-fromreceiptthroughshipmentoffinisheddevices.c)SemiconductorProcessing/TestingFacilities-fromreceiptthroughshipmentoffinisheddevices.d)ESDSDeviceUsers–fromreceipttoinstallationinahigherassembly/card2.2ApplicabledevicetypesThedevicetypesforwhichtheserequirementsareapplicableinclude,butarenotlimitedto,ESD-sensitivediscreteandintegratedcircuitsemiconductors,hybridmicrocircuits,andthinfilmpassivedevices.NOTE—ESDsusceptibility/sensitivitymaybedeterminedandspecifiedbythemanufactureroruser.JEDECStandardNo.625-APage23RelateddocumentsUnlessotherwisespecified,thefollowingdocumentsofthelatestissue,revisionoramendment,formapartofthisstandardtotheextentspecifiedherein.3.1ApplicabledocumentsANSI/ASQC-Q9001QualitySystems-ModelforQualityAssuranceinDesign/Development,Production,InstallationandServicing(USversionofISO-9001)ANSI/ASQC-Q9002QualitySystems-ModelforQualityAssuranceinProductionandInstallation(USversionofISO-9002)ANSI/EIA-471SymbolandLabelforElectrostaticSensitiveDevices(FormulatedbyJEDECJC-10Committee)ANSI/EIA-541PackagingMaterialsStandardsforESDsensitiveItemsANSI/EOS/ESD-S3.1StandardforProtectionofElectrostaticDischargeSusceptibleItems-IonizationANSI/EOS/ESD-S4.1StandardforProtectionofElectrostaticDischargeSusceptibleItems-Worksurfaces-ResistiveCharacterizationANSI/EOS/ESD-S6.1StandardforProtectionofElectrostaticDischargeSusceptibleItems-Grounding-RecommendedPracticeANSI/EOS/ESD-S7.1StandardforProtectionofElectrostaticDischargeSusceptibleItems-FloorMaterials-ResistiveCharacterizationofMaterialsANSI/NCSLZ540-1CalibrationLaboratoriesandMeasuringandTestEquipment-GeneralRequirementsANSI/EOS/ESD-S5.1HumanBodyModel(HBM)ElectrostaticDischarge(ESD)SensitivityTestingStandardJESD22-A114ElectrostaticDischarge(ESD)SensitivityTesting-HumanBodyModel(HBM)JESD22-A115ElectrostaticDischarge(ESD)SensitivityTesting-MachineModel(MM)JESD22-C101FieldInducedChargedDeviceModelTestMethodforElectrostaticDischargeWithstandThresholdforMicroelectronicModulesIEC-101/61340-5-1SpecificationfortheProtectionofElectronicDevicesfromElectrostaticPhenomena-Section1:GeneralRequirements.IEC-101/61340-5-2SpecificationfortheProtectionofElectronicDevicesfromElectrostaticPhenomena-Section2:UserGuide.JEDECStandardNo.625-APage33Relateddocuments(cont’d)MIL-HDBK-263ElectrostaticDischargeControlHandbookforProtectionofElectricalandElectronicParts,AssembliesandEquipment(ExcludingElectricallyInitiatedExplosiveDevices)MIL-STD-129MarkingforShipmentandStorage4TermsanddefinitionsForthepurposeofthisstandardthefollowingdefinitionsapply.airionizer:Asourceofchargedairmolecules(ions).antistaticmaterial:Referringtothepropertyofmaterialthatinhibitstriboelectriccharging.Antistaticmaterialsshallnottriboelectricchargetogreaterthan±1,000voltsundernormal/intendedusage.NOTE—Amaterial'santistaticpropertyisnotnecessarilycorrelatablewithitsresistivityorresistance.conductivematerial:Amaterialthathasasurfaceresistivitylessthan1x105ohmspersquareoravolumeresistivitylessthan1x104ohmcentimeter.NOTE—Aconductivematerialisnotnecessarilyantistatic.electrostaticcharge:see“staticelectricity”.electrostaticdischarge(ESD):Thetransferofelectrostaticchargebetweenbodiesorsurfacesthatareatdifferentelectrostaticpotentials.electrostatic-dischargesusceptibility[sensitivity](ESDS):ThelowestlevelofESDthatproduceschangesindevicecharacteristicssuchthatthedevicefailstomeetitsspecifiedcharacteristics.electrostaticfield:Linesofforcesurroundinganelectricallychargedobject.electrostaticshielding:Abarrierorenclosurethatlimitsthepenetrationofanelectrostaticfieldsothatitseffectsdonotreachthestoredorcontaineddevicesandproducedamage.equipmentground:Theentirelow-impedancepathfromapieceofelectricalequipmenttoahard-groundelectrode(e.g.,thethirdwire(green)terminalofareceptacle).ESDground:Thepoint,electrodes,busbar,metalstrips,orothersystemofconductorsthatformapathfromastaticallychargedpersonorobjecttoground.ESD-protectedarea:Aworkenvironmentwithmaterialsandequipmentthatlimitelectrostaticpotential.JEDECStandardNo.625-APage44Termsanddefinitions(cont’d)ESD-protectedworkstation:Aworkpositionwithmaterialsandequipmentthatlimitelectrostaticpotential.ESD-protectivepackaging:Apackagingsystemthatprovideselectrostaticprotectionandlimitstriboelectricchargingtolevelsthatdonotresultindevicedamage.ESD-protectiveworksurface:Atabletoporothersurfaceonwhichtoworkthathasaresistancetogroundoflessthan109ohmsground:(1)Aconductingconnection,whetherintentionaloraccidental,betweenanelectricalcircuitorequipmentandtheearthorsomeconductingbodythatservesinplaceofearth.(2)Theportionofanelectricalcircuitatzeropotentialwithrespecttotheearth.(3)Aconductingbody,suchastheearthorthehullofasteelship,usedasareturnpathforelectriccurrentsandasanarbitraryzeroreferencepoint.groundablepoint:Adesignatedconnection,location,orassemblyusedonanESDprotectivematerialordevicethatisintendedtoaccommodateelectricalconnectionfromthedevicetoESDground.insulativematerial:Amaterialhavingasurfaceresistivityofatleast1x1012ohmspersquareorvolumeresistivityofatleast1x1011ohmcentimeter.static:Ashortformofelectrostatic.staticdissipativematerial:Amaterialhavingasurfaceresistancebetween1x105ohmsand1x1011ohmsoravolumeresistivitybetween1x105ohmcentimetersand1x1011ohmcentimeters.staticelectricity:Electricalchargeatrest.NOTE—Theelectricalchargeisduetothetransferofelectronswithinabody(polarization)orfromonebodytoanother.surfaceresistance:Thedcvoltagedividedbythecurrentpassingbetweentwoelectrodesofspecifiedconfigurationthatcontactthesamesideofainsulativematerialoritem.NOTE—Surfaceresistanceisexpressedinohms.triboelectriccharging:Thegenerationofelectrostaticchargeswhentwopiecesofmaterialinintimatecontactareseparated(whereoneorbothisaninsulator).NOTE—Substantialgenerationofstaticelectricitycanbecausedbycontactandseparationoftwomaterialsorbyrubbingtwosubstancestogether.unprotectedESDSdevice:AnESDSdevicethatisnotinanESDprotectivepackage.NOTE—See“ESD-protectivepackaging”JEDECStandardNo.625-APage54Termsanddefinitions(cont’d)volumeresistivity(ρv):Thedcvoltageperunitthickness,appliedacrosstwoelectrodesincontactwithaspecimen,dividedbythecurrentperunitareapassingthroughthesystem.NOTE1Volumeresistivityisgenerallyexpressedinohmcentimeters.2WhenconcentricringelectrodesareusedasdescribedinASTM-D991,volumeresistivityiscalculatedfromthefollowingequation:π×()D2×Rvolumeresistivity(ρv)=14TwhereD1=diameterofinnerelectrodeordiskR=measuredresistanceinohmsT=thicknessofspecimen5Inspection,measuringandtestequipment5.1CalibrationsystemThecalibrationsystemforallinspection,measuringandtestequipmentusedtoperformrequiredESDItemCheckslistedintable2shallbecompliantwiththerequirementsofANSI/NCSLZ540-1andANSI/ASQC-Q9001/Q9002.5.2Recommendedinspection,measuringandtestequipmenttypesTherecommendedtestequipmenttypesandcapabilitiesarelistedbelow:a)AGo/No-gotester,ameter,anin-linemonitor,orequivalentresistancepathmeasuringequipmentshallbecapableofmeasuringtheresistanceofeachconnectionpath(e.g.,wriststrap,heelstraporESDprotectivefootwear)(see6.4.1and6.4.2)withinthetable2limits.b)Whenwriststrapmonitoringequipmentisused,itshallalarm(audioand/orvisual)whenawriststrapexceedsthelimitsspecifiedintable2andwhenthereisabrokenormissingconnectiontotheuserortoground.JEDECStandardNo.625-APage65Inspection,measuringandtestequipment(cont’d)5.2Recommendedinspection,measuringandtestequipmenttypes(cont’d)c)Electrostaticfieldmetersshallbecapableofverifyingthepresenceofelectrostaticfieldsintheworkenvironment.NOTES1Electrostaticfieldmetersusedinionizedairstreamsshallbeconstructed(e.g.,chopper-stabilized)tooperateinthatenvironment.2Inthisstandard,itemswithmeasuredpotentialgreaterthan+/-1000voltsaretobekeptatleast12inchesfromunprotectedESDSdevices.ThisreferstoMeasurementsof+/-1000voltsusingafieldmeterperthemanufacturer’sinstructions,typically+/-1000voltsatoneinch.d)MetersusedtoverifyESDgroundcontinuityshallbecapableofverifyingresistancevalueslessthanoneohm.e)Metersusetomeasureresistancetogroundandresistancepointtopointshallbecapableofverifyingresistancevalueswithinthetable2limits.f)Electrostaticchargedplatemonitorsshallbecapableofmeasuringthechargeneutralizationpropertiesofionizationequipmentwithinthetable2limits.6FacilitiesforESDprotectedareasandworkstations6.1MinimumrequirementsTheminimumrequirementsforESDprotectedareasandworkstationsarelistedintable1andillustratedinfigure1.TherequiredandrecommendedESDitemchecksarelistedintable2.JEDECStandardNo.625-APage76FacilitiesforESDprotectedareasandworkstations(cont’d)6.1Minimumrequirements(cont’d)Table1—MinimumrequirementsforESDprotectedareas,workstations,andtoolsITEMMINIMUMREQUIREMENTS1.ESDProtectiveWhereunprotectedESDSdevicesarehandled,agroundedstaticprotectiveWorksurfaceworksurfacewitharesistancetogroundoflessthan109Ωshallbeused.2.ESDProtectiveGroundedflooringorfloormatsareonlyrequiredwhenpersonnelormobileFlooringorFloorESDprotectiveworkstationsutilizefloorgroundingmethods.Mats3.PersonnelEachpersonhandlingorwithintwelve(12)inchesofunprotectedESDSGroundingdevicesshallbegroundedusingEITHER:a)Wriststrapsthatshall:1)ProvideacontinuouselectricalpathfromtheuserdirectlytoESDground.2)Haveanintegralresistanceatthewristbandendofthegroundingwirethatwilllimitcurrenttolessthan0.5mAthroughthatspecificpathtogroundatthehighestpowersupplyvoltagethatmaybeencountered.3)BewornbyoperatorshandlingunprotectedESDSdeviceswhenseated.b)ESDprotectivefootwear(heelstraps,toestrapsorshoes)thatshall:1)ProvideacontinuouselectricalpathfromtheuserdirectlytotheESDprotectiveflooringorfloormat.2)Bewornonbothfeet.3)Limitcurrenttolessthan0.5mAthroughthatspecificpathtogroundatthehighestpowersupplyvoltagethatmaybeencountered.4)NOTberelieduponforgroundingofseatedpersonnel.4.StaticGeneratinga)NonessentialandpersonalitemsshallnotbeplacedonESDprotectiveSourcesandworksurfacesthatareinuse.ChargedSurfacesb)Noitemwithanelectrostaticpotentialgreaterthan+/-1000volts(asmeasuredwithafieldmeter)shallbecloserthan12inchesfromunprotectedESDSdevices.c)Operations,equipmentorclothinggeneratingelectrostaticpotentialgreaterthan±1,000voltswithintwelve(12)inchesofunprotectedESDSdevicesshallbeneutralizedorreducedtolessthan±1,000volts.d)ChargeditemsmustnotcontactESDSdevices.5.ESDProtectiveWhenESDprotectivesmocksareworn,theyshallcoverallpersonalgarmentsSmocksabovethewaistexceptattheneckarea.6.AirIonizersAirionizersmaybeusedtoreduceelectrostaticpotentialstolessthan±1,000voltswithintwelve(12)inchesofunprotectedESDSdevicesifthosevoltagesarenotcontrolledbyothermeans.7.ESDProtectedESDcautionsignsshallbepostedateachESDprotectedworkstationorattheAreaandentrancesofdefinedESDprotectedareas.WorkstationIdentificationJEDECStandardNo.625-APage86FacilitiesforESDprotectedareasandworkstations(cont’d)6.1Minimumrequirements(cont’d)NOTES1G1(equipmentground)orG2(earthground)isacceptableforESDground.Wherebothgroundsareused,theyshallbeconnected(bonded)together.2R1ismandatoryforallwriststraps.Itsvalueshallbewithinthelimitsspecifiedintable2,1.a.3R2(forstaticdissipativeworksurfaces)andR3(forESDprotectivefloormats)areoptional.WhenR2orR3areused,theresistorvaluesshallbeasrecommendedbytheESDprotectiveequipmentmanufacturer.ESDprotectiveflooringshallbeconnecteddirectlytotheESDgroundwithoutR3.4Seeparagraph7ofthisstandardforgroundingdetails(ReferenceEOS/ESD-S6.1).Figure1—ESDprotectedworkstation(SideView)JEDECStandardNo.625-APage96FacilitiesforESDprotectedareasandworkstations(cont’d)6.1Minimumrequirements(cont’d)Table2—ESDprotectiveitemchecksFREQUENCYITEMSACCEPTANCEREF.(seeNotes1&2)LIMITSPARA.1.RequiredDailya)Wriststraps(seeNote3).≥500kΩto≤10MΩ6.4/6.4.1b)ESDprotectivefootwear(seeNote4).≥500kΩto≤109Ω6.4/6.4.2c)PersonnelESDprotectivesmock(e.g.,Visualcheck11.4buttonedsmocks)onpersonnelrequiredtowearthem.d)WriststrapsorESDprotectivefootwearVisualcheck6.3onpersonnelrequiredtowearthem.2.Recommendeda)ESDprotectedworkstation.(e.g.,Visualcheck7.3/7.4.1/Weeklygroundconnections)7.4.2b)ESDprotectivefloormat(e.g.,Visualcheck7.3/7.5cleanlinessandfreedomfromtears).c)ESDgroundconnections(e.g.,wristVisualcheck7.3/7.6straps,matgroundwires).3.RecommendedESDprotectedareaandworkstationstatic≤±1,000voltswithin126.5Monthlyvoltagesurveys.inchesofunprotectedESDSdevices4.Recommendeda)ESDprotectivestaticdissipative≥105to<109Ω4.18/7.3/QuarterlyworksurfacetoESDgroundresistance7.4.1(SeeNote5).b)ESDconductiveworksurfacetoESD<100kΩ(withnoseries4.3/7.3/groundresistance.(seeNote5)resistor)7.4.2c)ESDprotectivefloortoESDground≥104to<109Ω(see7.5resistanceusingEOS/ESDS7.1.Note8)d)Wriststrapmonitorcheck.≥500kΩto≤10MΩ6.4.3e)ESDgroundcontinuityfromthe<1.0Ω4.10/7.6/groundablepoint(e.g.,shelvingground7.7/7.8/7.9wires,mobileequipmentgroundwires,cordgroundwires)usingEOS/ESD-S6.1.(seeNote6)5.Recommendeda)IonizerbalanceusingEOS/ESD-S3.1.Balance<±35V11.3eSemiannually(seeNote7)b)IonizerchargedecayperformanceusingChargedecay11.3fEOS/ESD-S3.1.(SeeNote9)performancepermanufacturer'sspecification.JEDECStandardNo.625-APage106FacilitiesforESDprotectedareasandworkstations(cont’d)6.1Minimumrequirements(cont’d)Table2—ESDprotectiveitemchecks(cont’d)FREQUENCYITEMSACCEPTANCEREF.(seeNotes1&2)LIMITSPARA.6.RecommendedESDsystemcompliancetotherequirementsUsingtheESDAudit9.2AnnuallyofthisstandardChecklistorequivalent.NOTES1TheESDItemcheckfrequenciesshouldbeestablishedtoensurethattheitemsremaincompliantbetweenchecks.2TheESDitemchecksshallbeperformedmorefrequentlythanlistedwhen